Did you consider something like espacer by showa denko? It is a conductive
water-soluble polymer.

Mathieu
________________________________

From: mems-talk-bounces@memsnet.org on behalf of Hyunsoo Park
Sent: Sun 2006-10-15 11:39 PM
To: General MEMS discussion
Subject: Re: [mems-talk] To remove Al layer from PMMA/glass substrate



Thank you for reply.

I can't use gold right now. could anyone tell the solution to remove
Al layer without any damage to PMMA?

Otherwise, could anyone tell me another way to use glass substrate in
E-beam lithography?

Thank you.