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MEMSnet Home: MEMS-Talk: Nickel wet etching
Nickel wet etching
2006-10-18
prabhu arumugam
2006-10-18
Roger Shile
polyimide
2006-10-18
Hsiu-Jen Wang
Anyone know what this thing called and where to buy it from? Chip carrier? Chip bonding packaging pad?
2006-10-19
Guangchi Archie Xuan
Anyone know what this thing called and where to buy itfrom? Chip carrier? Chip bonding packaging pad?
2006-10-19
Erik Jung
Anyone know what this thing called and where to buy it from? Chip carrier? Chip bonding packaging pad?
2006-10-19
Bill Flounders
Nickel wet etching
Roger Shile
2006-10-18
I usually use Aluminum Etch (phosphoric Acid based) to etch Ni films.  I
believe JT Baker is a supplier.

Roger Shile

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of prabhu arumugam
Sent: Wednesday, October 18, 2006 9:18 AM
To: General MEMS discussion
Subject: [mems-talk] Nickel wet etching

Hello MEMS folks,
can anyone tell me the what we use to etch nickel
films (approx. 30 nm thick)deposited by ebeam and the
supplier.
reply
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