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MEMSnet Home: MEMS-Talk: Re: Etching of Al films
Re: Etching of Al films
1998-05-19
STEVE ROSENBERG
1998-05-19
GWht
Re: Etching of Al films
GWht
1998-05-19
Typical Al etch solution is a mixture of phosphoric, acetic and nitric acids.

Southwest Microelectronics Materials, Inc. in Chandler, Arizona can supply
this and other semiconductor processing chemicals.  Contact Mike Dodd, pres.
at [email protected] or phone 602/926-1222.

Jack Shelton
SWS  602/839-9850


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