A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: grainy aluminum film
grainy aluminum film
2006-11-06
Andrew Xiang
2006-11-06
Hongjun-ECE
2006-11-07
Kannan Ramaraj
grainy aluminum film
Andrew Xiang
2006-11-06
We looked at our aluminum under SEM and notice the surface is very grainy under
40,000X. Don't know if it is normal. The Al is evaporated at 1E-6 torr at 50A/s.
Thickness about 1600A. Are there ways to reduce the grain structure and make it
more smooth?

-Andrew
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
Addison Engineering
Harrick Plasma, Inc.