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MEMSnet Home: MEMS-Talk: wafter process boat (or cassatte) can be immersed in SU8 developer
wafter process boat (or cassatte) can be immersed in SU8 developer
2006-11-16
Shao Guocheng
wafter process boat (or cassatte) can be immersed in SU8 developer
Shao Guocheng
2006-11-16
hi, guys:
       I need some wafter boat which can be immersed into the SU8 developer. I
have some which came with the wafer I bought. But I'm not sure which material
are they made of, or can they resist the SU8 developer? Is there anyone who has
experience on this, or do u know where to buy such kind of process boats, any
suggestion will be appriecated. thx

  Guocheng Shao

  Mechanical Engineering, LSU

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