Hi everybody,
Could some one tell me about Ti silicidation process. I 'd like to fabricate
Si nanowire on SOI wafer with contact lanes by TiSi2. What should I do to
make TiSi2? How does  the TiSi2 etch?
Thank you vary much.
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MSc Vu Xuan Thang
ITIMS, HUT, Hanoi, Vietnam