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MEMSnet Home: MEMS-Talk: E-beam lithography
E-beam lithography
2006-12-07
jpt sharma
2006-12-07
Seth Burtner
2006-12-07
Brubaker Chad
E-beam lithography
jpt sharma
2006-12-07
HI all
  Is there anyway to do ebeam lithography with out baking the e-beam resist
after spinning? OR baking at low temperaute <80 C
  Hope to hear from you soon.
reply
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