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MEMSnet Home: MEMS-Talk: etching of chrome and gold
etching of chrome and gold
2006-12-08
deepak agrawal
etching of chrome and gold
deepak agrawal
2006-12-08
Dear All,
In my device, I am using aluminum layer as a sacrificial and silicon nitride
as a structure layer. At the top, it has the combined layer of chrome and
gold as a electrode. Which etchants I can use to etch the gold and chrome
layer in a manner so that it will not affect the nitride and aluminum layer.


Regards
deepak
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