Richard,
This is Nalin Parikh. How are you? Glad to hear from you. For oxide
deposition I guess MCNC still works with 4 " wafer and someone can do
there. Call MCNC and see if you can find out. If you have any difficulty,
let me know.
Nalin


>Does anyone know where I can get ~8 microns of SiO2 deposited on
>some 4" wafers ?
>
>(We could do it here by LPCVD, but with 3% silane it would take a very
>long time...  Spin-on glass is certainly an option, but for these wafers
>I'd prefer to avoid it.)
>
>Thanks in advance,
>
>- r.
>