Sonia,
Look it up in Google or the same. SAES getters in Italy has one solution and
there was at least one other company that was offering similar products.
These are cover wafers with getter layer on them

Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of GARCIA BLANCO Sonia
Sent: Tuesday, December 12, 2006 3:46 PM
To: [email protected]
Subject: [mems-talk] Getter for MEMS vacuum packaging

Dear All,

I was wondering if somebody could suggest a good getter for vacuum packaging
of MEMS structures.