Hi,

Powderblasting with a photoresist foil as the mask or HF etching with Cr-Au
mask also work well.

Anil

On 12/13/06, Shay Kaplan  wrote:
>
> Gareth,
> ECD does work but the yields is very low, especially in thin wafers - they
> crack once you make the last hole!
>
> Shay
>
> -----Original Message-----
> From: [email protected] [mailto:[email protected]]
> On Behalf Of Gareth Jenkins
> Sent: Wednesday, December 13, 2006 4:03 PM
> To: General MEMS discussion
> Subject: Re: [mems-talk] etch through hole on pyrex glass
>
> You could try electrochemical discharge machining (also known as spark
> erosion).
> I believe two Japanese researchers, Shoji and Esashi, published work on
> this
> a while back, although I can no longer find the reference.
>
>
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--
Anil Agiral
PhD student
MESA+ Institute for Nanotechnology, University of Twente
Faculteit Elektrotechniek, Wiskunde en Informatica
BIOS, the Lab-on-a-Chip Group