Andrea,
Those products should work well for you depending on your process, you
may want to have your pumping lines heated and insulated before and
after the trap to help keep the condensable vapors from sticking to the
lines elsewhere. (if you don't have them that way already) Ideally you
want the stuff to all stay in the trap, so it should be as close to the
system as possible. The reality is these systems can build up a lot of
material in a short amount of time in other areas of the foreline and
exhaust which will adversely affect your process with time if left
alone. (again, heavily process dependant.)  Extreme care should be used
when maintaining these exhaust systems as they can be toxic, hot and
potentially pyrophoric if valves and plumbing are not sequenced and
purged correctly.  Since these traps are usually water cooled, a visual
indication of water flow and shut off valves or positive shutoff
quick-connects are a must.

Good Luck,
Doug

Doug Stewart
Equipment Maintenance Supervisor
Infotonics Corporation
5450 Campus Drive
Canandaigua, NY 14424
(585) 919-3068
[email protected]


-----Original Message-----
From: Andrea Mazzolari [mailto:[email protected]]
Sent: Tuesday, December 12, 2006 3:12 PM
To: 'General MEMS discussion'
Subject: [mems-talk] LPCVD trap exhaust

Hi all, here we have a LPCVD system. For exhaust management we use a
home-made trap positionated at the exit of the furnace.
I'm looking for something better than what we actually have.
Until now i've found those products:
http://www.massvac.com/pages/prod_vacuum_traps.html
http://www.mksinst.com/product/product.aspx?ProductID=488&source=search

Do you have any other suggestion ?

Best regards,
Andrea Mazzolari