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MEMSnet Home: MEMS-Talk: Quartz wet etching
Quartz wet etching
2006-12-14
Barbara Cortese
2006-12-14
bobhendu@aol.com
2006-12-15
P.E.M. Kuijpers
BHF precipitates ?
2006-12-15
Andrea Mazzolari
2006-12-18
Barbara Cortese
2006-12-18
Jesse D Fowler
Quartz wet etching
Barbara Cortese
2006-12-14
Dear all
I'm wet etching quartz with a BHF solution 6:1, but I have encounterd some
difficulties in etching.
What I do is a photolithographic process on the quartz substrate, a hardbake of
4 hours at 180° and then the wet etching process.
What I obtain though is the rearrangement of the photoresist in a disordered
pattern and no etching!
Has anyone an idea where I go wrong?
Barbara
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