A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: sublimation drying
sublimation drying
2006-12-17
Ernesto Di Paola
sublimation drying
Ernesto Di Paola
2006-12-17
Hi all,
I have some problem with drying of free-standing beams and cantilevers:
it is the popular problem (many time posted...) of the sticking on the
substrate. My drying process has been performed by evaporation of the
solvent but I think that the sublimation of the final rinse solvent could be
the best way. In order to do that I need a solvent with a melting point over
-15°C (I cannot reach a more low temerature); the sublimation will be
performed in a vacuum chamber at 4e-3 torr. Moreover it is not possible to
use a solvent with a lower density in its solid state (no expansion of the
volume is allowed). Can anybody help me in the choise of an appropriate
solvent? Is the mixture water/IPA a good solution?
Thanks in avanced,
Best Regards,
Ernesto
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
Tanner EDA by Mentor Graphics