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MEMSnet Home: MEMS-Talk: Su8-2100 soft bake
Su8-2100 soft bake
2006-12-14
Barbara Cortese
2006-12-15
Gareth Jenkins
2006-12-15
GARCIA BLANCO Sonia
2006-12-18
st20000
Su8-2100 soft bake
st20000
2006-12-18
I think the reason is that your baking temperature is lower , so solvent can't
evaporate completely.

You can try higher temperature or more time.

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st
2006-12-18

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