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MEMSnet Home: MEMS-Talk: Quartz wet etching
Quartz wet etching
2006-12-14
Barbara Cortese
2006-12-14
[email protected]
2006-12-15
P.E.M. Kuijpers
BHF precipitates ?
2006-12-15
Andrea Mazzolari
2006-12-18
Barbara Cortese
2006-12-18
Jesse D Fowler
Quartz wet etching
Jesse D Fowler
2006-12-18
It looks like Peter's suggesting wet etching the Cr with your mask. For
lift-off, you would have to image-reverse your mask.

Jesse Fowler

"Barbara Cortese" 
Subject Re: [mems-talk] Quartz wet etching

Dear Peter
Are you suggesting to evaporate a Cr layer after developing the
photoresist and no hardbake?
Don't you think it could be a problem of the type of photoresist?
reply
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