At 11:13 AM 5/22/98 -0400, you wrote:
>
>Does anyone know the acoustic impedance and density of silicon nitride?
>Does it make a difference if the SiN is sputtered, PECVD, or LPCVD?
>
>Thanks,
>Carl


It's me again !

I "dug" a little bit into my papers and found these references :

1. Young's modulus and residual stress of LPCVD silicon-rich silicon nitride
determined from membrane deflection
Richard Stewart, Jongnam Kim, Eun Sok Kim, Richard White and Richard S.
Muller
Sensors and Materials, 2, 5 (1991) 285-298

2. Silicon nitride films deposited from SiH2Cl2-NH3 by low pressure chemical
vapor deposition: kinetics, thermodynamics, composition and structure
S.L. Zhang, J.T. Wang, W. Kaplan and M. Ostling
Thin Solid Films, 213 (1992) 182-191

3. LPCVD against PECVD for micromechanical applications
4. A. Stoffel, A. Kovacs, W. Kronast and B. Muller
Journal of Micromechanics and Microengineering
6 (1996) 1-13

4. Silicon nitride single-layer x-ray mask
M. Sekimoto, H. Yoshihara and T. Ohkubo
Journal of Vacuum Science and Technology
21(4), 1982, 1017-1021


By,

eric


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Eric Bonnotte

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