Try Ti/Pt/Au, 50 nm / 100 nm / 500 nm Au.  The Ti will be somewhat attacked by
KOH.

Let me know if it works.

Jon




At 08:54 AM 5/27/98 +0100, you wrote:

>Hi,

>I am a PhD student working on a new electroless etch stop technique.

>Could you help me with the following problem:

>What kind of metal process do I need to get a gold layer on silicon

>which survives KOH or TMAH at high temperatures. We have tried

>evaporated Au/Cr but that comes of after a few hours?

>If you can help me please e-mail: [email protected]

>Thanks

>

>

>

>

>

Jonathan Bernstein

MEMS Technology Center

Draper Labs, MS 37

555 Technology Square

Cambridge, MA 02139 USA


[email protected]

Tel. (617) 258-2513

Fax  (617) 258-4238