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MEMSnet Home: MEMS-Talk: PMMA
PMMA
2007-01-10
paolo bondavalli
2007-01-10
Jeff chen
2007-01-11
Ranjini Menon
PMMA
Ranjini Menon
2007-01-11
Dear Paolo,
PMMA can be used for photo/ionbeam/ electron beam lithography

On 1/10/07, paolo bondavalli  wrote:
>
> Dear members,
> I need some information abour PMMA.
> Is it used for photo-lithography?
> Is it photo-sensitive?
> Is it resistant to ethanol?
>
--
Ranjini Menon
Scientific Officer
VECC
Department of Atomic Energy
1/AF , Salt lake city
Kolkata
West bengal-700064
phone:033 2337 1230 extn 3204
fax: 033 2334 6871
e-mail: ranjini@veccal.ernet.in
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