You might try CF4 + 10-20% H2.  It will not be perfectly selective to
polymers but may be better than some other options.

-Mike
 U. of Louisville

-----Original Message-----
From: [email protected]
To: [email protected]
Sent: Mon, 15 Jan 2007 7:52 AM
Subject: [mems-talk] nitride etch


hi,
could anybody share with me her/his nitride etching recepie please?!!!
wish to etch away ~200nm of nitride (SiNx) from a polymer substrate!