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MEMSnet Home: MEMS-Talk: Lift-off Recipe
Lift-off Recipe
2007-01-15
Ravi Shankar
2007-01-16
Yue Mun Pun, Jeffrey
2007-01-16
sachin narwade
2007-01-16
Joseph Grogan
2007-01-16
Bill Moffat
2007-01-17
Yue Mun Pun, Jeffrey
Lift-off Recipe
Yue Mun Pun, Jeffrey
2007-01-17
Hi,
My sample comprise of spinning AZ5214E resist on a composite film of =
Gold(30nm)-on-Chromium(5nm) thermally evaporated on SU-8.  I use AZ5214E =
resist to pattern Gold on underlying Chromium, which has been evaporated =
on SU-8 previously.  When lifting off the Gold  & AZ5214E resist using =
Acetone, how do I ensure that the Chromium is not lifted off as well as =
the unexposed SU-8 underneath the Chromium?
I have experienced the Acetone strips off Chromium and unexposed SU-8 as =
well.  This is undesired.

Thanks.

Jeffrey
reply
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