>Dear sirs,
>
>In the design of cantilever beams and doubly-supported beams many authors
>have been used interferometric techniques to measure the deflection of
>those microestructures. Could anyone E-mail me where I can buy an
>optical microscope to measure vertical deflection?



Have a look at my web page. We deal with deflections in the micrometer range.
In contrast to AFM's  (always limited to the interaction of an exteremly
sharp tip and a
surface) we work with planar contacts.

Right now we are in the process of finishing the design of a commercial
tester for
friction and adhesion measurement. With the tester one can also probe samples or
MEMS simply by approaching them and by simultaneously measuring the force
(deflection) necessary
to deflect the micro part.
At: http://www.tetra-ilmenau.de/applikat.htm#force1
you find our latest development, a glass double leaf spring with integrated
drive and
deflection sensor.

For any further question do not hesitate and contact me.

Best Regards.

  Matt Scherge

-------------------------------------------------
Dr. Matthias Scherge
Institut fuer Physik der TU Ilmenau
Weimarer Strasze 32
PF 100565
D-98684 ILMENAU
Tel.: 49 3677 693654
Fax.:49 3677 693205
http://imath.mathematik.tu-ilmenau.de/phys/personal/tribo.html