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MEMSnet Home: MEMS-Talk: Deep SU-8
Deep SU-8
2007-01-19
Peng Li (Paul)
2007-01-19
Gareth Jenkins
Deep SU-8
Gareth Jenkins
2007-01-19
With standard tools this should be easily attainable. Typical aspect
ratios of 1:20 can be achieved with a suitable mask aligner, 1:100 has
been reported with more advanced techniques.
Take a look at the following link for more info and a good overview of SU-8:
http://memscyclopedia.org/su8.html


Peng Li (Paul) wrote:
> Dear all,
>
> Is that possible to make a 200 um depth and 50 um width mold via SU-8?
> What's the maximum attainable aspect ratio via SU-8 molding?
> Looking forward to hearing from you guys!
>
> Thanks!
>
> Peng Li
>
>


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