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MEMSnet Home: MEMS-Talk: BHF solution
BHF solution
2007-01-19
Barbara Cortese
2007-01-19
Gareth Jenkins
2007-01-19
Kirt Williams
2007-01-19
Barbara Cortese
BHF solution
Barbara Cortese
2007-01-19
With no success I mean poor etching rate. Do you have a good recipe to suggest a
solution that can give me a rapid deep (> than 10 micrometers) etching pit?

> What do you mean by no success - poor quality or something else? The
> type of glass is also relevant. I have had good results with 2% conc. HF
> + 2% conc. HNO3 when using soda-lime glass. I have never tried it on
> quartz though, but I would not expect it to etch at a similar rate.
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