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MEMSnet Home: MEMS-Talk: How to remove PR in the sample with CNT
How to remove PR in the sample with CNT
2007-01-29
Lin Yu
2007-01-31
Thomas Helbling
How to remove PR in the sample with CNT
Lin Yu
2007-01-29
Dear all,

I would like to remove positive photoresist after treating sample in RIE.
And I found that it's very difficult to remove the photoresist in acetone.
Then I want to use PRS 2000. But I don't know whether it will attack
the Carbon nanotube in my sample. Does anyone have the experience
or any suggestion about removing PR in the sample with CNT?

Thanks a lot!
Lin Yu
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