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MEMSnet Home: MEMS-Talk: Sacrificial polyimide with low CTE
Sacrificial polyimide with low CTE
2007-01-30
Jill Yang
Sacrificial polyimide with low CTE
Jill Yang
2007-01-30
Hi folks,

I am looking for polyimide with small CTE (<3 ppm). It should also be easily
removed in oxygen plasma. Any information is appreciated.

Thanks in advance.

Jill
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