A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Annealing of Ti-Ag-thin films on Si
Annealing of Ti-Ag-thin films on Si
2007-01-30
Miyakawa, Natsuki
2007-01-30
Michael D Martin
Annealing of Ti-Ag-thin films on Si
Miyakawa, Natsuki
2007-01-30
Dear all,
I want to do PVD of Ti (~10nm, as adhesive layer) and Ag (~100-200nm) on
Si consecutively. Could anyone suggest me annealing parameters for
adhesion enhancement? The surface should remain pure silver afterwards
(no oxide etc.), so should I anneal the samples under N2-atmosphere?
Should Ti and Ag be annealed separately under different conditions?
Many thanks!

Best regards
Natsuki Miyakawa

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
Addison Engineering