A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Metal coatings for hot-embossing tools
Metal coatings for hot-embossing tools
2007-02-01
Gareth Jenkins
Metal coatings for hot-embossing tools
Gareth Jenkins
2007-02-01
Hi

I wish to deposit metal coatings on SU-8 structures to serve as tools
for hot-embossing.
I know nickel is commonly electroplated for this purpose but the
facility I have access to currently only has an evaporator with silver
and aluminium sources (we have no electroplating facility).
Does anyone know if evaporated layers of silver or aluminium stand any
chance of working? I only need to replicate a few structures but I need
to make them quickly so I don't have too much time to get a nickel
source or set-up an electroplating facility.
N.B. I will be embossing into COC and PMMA.
Many thanks

Gareth
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
Addison Engineering
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing