Dear Members,

  Can any one tell me the oxidation rate of single-crystal silicon(100) have
higher or lower

  oxidation rate then polysilicon at room temperature and why?

   Because for my result the single-crystal silicon(100) have lower oxidation
rate then polysilicon,but the initial thickness the single-crystal silicon is
higher then the polysilicon.
   So is that mean the single-crystal silicon(100) have higher oxidation rate at
room temperature.WHY?


Thanks

Jay