For an introduction, review of materials and processes, packaging, and
descriptions of the function and fabrication of a number of sensors and
actuators used in the automotive, medical diagnostic, communications,
consumer, and other industries,
I recommend "An Introduction to Microelectromechanical Systems Engineering,
2nd Edition," by Nadim Maluf and Kirt Williams, Artech House, 2004, ISBN
1-58053-590-9.
But then I could be biased.   :-)
    --Kirt Wiliams

----- Original Message -----
From: "mohendra roy" 
To: "General MEMS discussion" 
Sent: Friday, February 02, 2007 2:48 AM
Subject: [mems-talk] HI

> HI ALL
> can any one tell me about a good book for MEMS