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MEMSnet Home: MEMS-Talk: Re: CVD of tungsten and dry etching of tungsten
Re: CVD of tungsten and dry etching of tungsten
1998-06-01
Reid Alyn Brennen
Re: CVD of tungsten and dry etching of tungsten
Reid Alyn Brennen
1998-06-01
Richard,

You might try Ultramet in Pasadena, California.  I do not have
an address for them.  They have definitely performed CVD tungsten
in the past.

-Reid

--
.______________________________________________________________________.
|Reid (Turtle) Alyn Brennen                Hewlett-Packard Laboratories|
|rbrennen@hpl.hp.com                       Chemical Systems Department |
|(650) 857-4469 office                     3500 Deer Creek Road, MS 26U|
|(650) 852-8502 Fax                        Palo Alto, CA 94303-0867    |
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