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MEMSnet Home: MEMS-Talk: anodic bonding of glass and si
anodic bonding of glass and si
2007-02-07
Daniela Kögler
2007-02-07
Roger Shile
2007-02-07
Edward Castellana
2007-02-07
Bill Moffat
anodic bonding of glass and si
Daniela Kögler
2007-02-07
Hi,

I tried to bond a glass (pyrex) and si wafer with 1000 V, 430°C and 30
minutes (point cathode), both wafer cleaned with acetone. Unfortunately it
did not work. There was only a vacuum between the wafers and it was
possible to separate them after the bonding.

I appreciate your help and any kind of advice.
Arnold

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