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MEMSnet Home: MEMS-Talk: Sol-Gel Silicon oxide
Precipitate during KOH etching
2007-02-08
sheeja mathew
2007-02-09
Ravi Shankar
2007-02-09
Thomas Xu
silicon nitride windows/membranes
2007-02-12
Joseph Grogan
Sol-Gel Silicon oxide
2007-02-13
Hichham-ElDin
2007-02-13
Rashid, Mamun
2007-02-13
Hichham-ElDin
2007-02-13
Rashid, Mamun
Sol-Gel Silicon oxide
Rashid, Mamun
2007-02-13
Hello ,
You can prepare sol-gel by using ETOH, TEOS and water.
Method
Ratio of chemicals
  ETOH : TEOS: water = 10 :5: 2
Mix  ETOH , ETOS and water and keep them in the sonicator for 30 mins.
Afterward add 2 drops of conc HCl( it will act as catalyst) and leave
for further 30 mins. Sol gel will be prepared.
Thank you,
Mamun Rashid

PhD Candidate
Teesside Centre for Nanotechnology & Microfabrication
School of Science & Technology
University of Teesside.
TS1 3BA. U.K
01642342428
www.mamun.info




-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Hichham-ElDin
Sent: 13 February 2007 13:23
To: General MEMS discussion
Subject: [mems-talk] Sol-Gel Silicon oxide

Hi all,

I’m in need to prepare Sol-Gel silicon oxide using
TEOS. And as I do not have a good background in
chemistry, I wish if some body helps me in giving a
complete receipt (or any helpful information) for the
preparation process.
reply
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