Hey Lujun,

The microcracks usually happen at post bake. Try to control your post
bake procedure. Ramp heat your mold and then let it cool gradually to room
temperature.
Hope this may help!

Peng Li

> Dear all,
>
> At the end of my process, I saw many cracks inside the SU-8 structures.
> Did
> that happen to anyone before? If so, do you know in which step it might
> cause the cracks ?

--
Peng Li
Research Assistant
Department of Mechanical Engineering & Applied Mechanics
University of Rhode Island
133D Kirk, 92 Upper College Road,
Kingston, RI  02881
Phone: (401) 874-2247