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MEMSnet Home: MEMS-Talk: Removal of post-lift-off resist residue
Removal of post-lift-off resist residue
2007-02-27
Yue Mun Pun, Jeffrey
2007-02-28
Pradeep Dixit
2007-02-28
Yue Mun Pun, Jeffrey
Removal of post-lift-off resist residue
Yue Mun Pun, Jeffrey
2007-02-27
Hi,
I have patterned some gold heaters using lift-off process with AZ5214E resist.
The lift-off was done using AZ5214E resist.  However, I noticed plenty of tiny
resist residue remaining on the wafer after the lift-off process, which cannot
be removed using further acetone wash nor ultrasonic power.  Can anyone tell me
how I can remove this residue to result in a clean wafer?
Thanks.

Jeffrey
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