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MEMSnet Home: MEMS-Talk: Bismuth etching
Bismuth etching
2007-03-01
Zhiwei Zou
2007-03-02
Jim Beall
Bismuth etching
Jim Beall
2007-03-02
I have used:

  5% H2O2:5% H2SO4:90% H2O.

to etch 6.66 µm Bi. My notes say that 2.5% may be better, but I have
no data.
Photoresist gap was 5 µm and yielded 12-15 µm etched linewidth.

>
> Does anyone knows about the wet etchant for the Bismuth thin film?

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