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MEMSnet Home: MEMS-Talk: RE: 2 inch wafers
RE: 2 inch wafers
1998-06-12
Michel Rosa
RE: 2 inch wafers
Michel Rosa
1998-06-12
Hi Karin,

What BOX thickness can you deliver in your range of SOI ?

Mike Rosa.



At 08:17 9/06/98 +0000, you wrote:
>Dear Dr. Ramaraju,
>
>I don't know of anyone manufacturing 2" SOI wafers. I actually don't
believe 3" is commercially available either, but I am not completely sure.
>
>I work for a company called BCO Technologies. We are a manufacturer of 100,
125 and 150 mm diameter SOI wafers, with silicon device layers of 2 um and
above. The thickness uniformity we can achieve is
>+/-0.5 um, so the 10% you need on a 20um layer is not a problem.
>
>If you think you can somehow use 100 mm (that is, about 4"...) wafers,
please let me know, and I would be happy to send you a quotation.
>
>Best regards,
>
>Karin
>
>***************************************************************************
********
>Dr. Karin Hermansson
>European Marketing Manager
>BCO Technologies PLC
>339 Glen Road
>Belfast BT11 8BU
>United Kingdom
>Tel: +44 1232 615599
>Fax: +44 1232 616788
>Mob: +44 410 423479
>**** Don't forget - we're on the Internet! http://www.bco-technologies.com ****
>***************************************************************************
********
>
>-----Original Message-----
>From:   PC :ramaraju@doe.ernet.in [SMTP:PC :ramaraju@doe.ernet.in]
>Sent:  Tuesday, June 09, 1998 7:57 AM
>To:     MEMS@ISI.EDU;  scott.blackstone@BCO-Technologies.com;
Karin.Hermansson@BCO-Technologies.com
>Subject:       2 inch wafers
>
>
>
>I am looking for 2 inch dia <100>  n-type bonded wafer with sandwitched
>1um
>Si O2 layer.  The wafer may be Si <100>  base with thickness >250um,
>SiO2 layer with
>1Um +/- 10% thickness and then n-type  Si layer <100> with 20um +/- 10%
>thickness.
>
>Does anyone know who sells them and at what price?
>
>TThanks in advance
>
>
> Dr. GV Ramaraju
> Department Of  Electronics
> New Delhi, India
>
>
>
> << File: ENVELOPE.TXT >>
>
>
>


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