A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Complex Permittivity of Silicon Dioxide
Complex Permittivity of Silicon Dioxide
2007-03-06
Oguz Elibol
Complex Permittivity of Silicon Dioxide
Oguz Elibol
2007-03-06
Hi All,

I am having a hard time finding the complex permittivity for thermally grown
silicon dioxide. I need the complex permittivity, or loss tangent for
frequencies from DC to about 100 MHz,  (it can be a table or plot, anything
I can get) can anybody suggest a source for this information? Thanks in
advance...

Oguz
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
University Wafer
Process Variations in Microsystems Manufacturing
Addison Engineering