Yitian,
Ti is easily etched in NH4OH:H2O2 in the proportion 1:2 or 1:3 at a rate =
of 2.5nm/s, and gold can be etched either with KI:I2:H20 in the =
proportion of 4:1:40ml or 10%:5%:85%.  However the KI:I2 mixture is dark =
brown and you can't observe the progress of the gold etch.  Another =
chemistry is HCl (37%):HNO3 (65%):H2O in the proportion 3:1:2, which I =
have observed to etch 180nm og evaporated gold in 54seconds.  In this =
chemistry you can clearly observe the gold dissolving away.  However I =
was told that this chemistry attacks photoresist.
=20
Jeffrey

________________________________

From: [email protected] on behalf of =
[email protected]
Sent: Tue 3/6/2007 7:23 AM
To: General MEMS discussion
Subject: [mems-talk] Recipe and procedure to etch Ti and Gold

Hi everyone
  Can you give the recipe and procedure of etch the Ti and Gold.
Ti(6nm) Gold(50nm)