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MEMSnet Home: MEMS-Talk: Glass Thermal Bonding
Glass Thermal Bonding
2007-03-05
Rupesh Sawant
2007-03-06
Marc Häfner
2007-03-06
Paul van Midwoud
2007-03-06
Gareth Jenkins
Glass Thermal Bonding
Gareth Jenkins
2007-03-06
You could try applying a droplet of water to the edge of the pre-bonded
pieces.
Capillary forces should draw some water in between the plates and stick
the two together. It takes a little practice to get it right but I have
used this technique successfully in the past.
However, you may have problems with your electrodes when thermally
bonding glass at high temperature (with or without the presence of water).



Rupesh Sawant wrote:
> I am trying to bond glass slides thermally. But I am facing problem in
> transferring the aligned glass slide to the furnace. My procedure of
> alignment is as follows:
>
> I stick the glass slide having integrated electrodes on it to a plane
> square glass plate. This plate is then fixed in position of the glass
> mask in the aligner.
> The slide having the channels is kept on the wafer stage of the
> aligner and the alignment is done.
> But after the alignment I need to transfer the slides to a furnace
> nearby. How do i take the aligned slide (no bonded yet) to the
> furnace. Can someone suggest me a technique to hold the aligned slides
> temporarily in place till I put them in furnace.


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