Yitian,
Ti is easily etched in NH4OH:H2O2 in the proportion 1:2 or 1:3 at a rate of
2.5nm/s, and gold can be etched either with KI:I2:H20 in the proportion of
4:1:40ml or 10%:5%:85%.  However the KI:I2 mixture is dark brown and you can't
observe the progress of the gold etch.  Another chemistry is HCl (37%):HNO3
(65%):H2O in the proportion 3:1:2, which I have observed to etch 180nm og
evaporated gold in 54seconds.  In this chemistry you can clearly observe the
gold dissolving away.  However I was told that this chemistry attacks
photoresist.

Jeffrey

________________________________

From: mems-talk-bounces@memsnet.org on behalf of yitianp@email.arizona.edu
Sent: Tue 3/6/2007 7:23 AM
To: General MEMS discussion
Subject: [mems-talk] Recipe and procedure to etch Ti and Gold

Hi everyone
  Can you give the recipe and procedure of etch the Ti and Gold.
Ti(6nm) Gold(50nm)