I have thin layer of Silicon dioxide over sapphire wafer which I want to remove
off the wafer. I tried dipping in BOE/ HF but it is etching away sapphire too. I
was wondering what chemical do I use to remove just silicon oxide and no
sapphire.
Thanks,


----------------------------------------------------
  Nitin Shukla
  PhD Candidate
  Nanoscale Energy Transport Laboratory
  Department of Mechanical Engineering
  Virginia Tech
  Blacksburg, VA 24061
  Tel No: 540-231-5579