MEMS-talk

News	MEMSnet Home: MEMS-Talk: hi for help about the develop hi for help about the develop 2007-03-13 [email protected] 2007-03-13 Shay Kaplan 2007-03-14 [email protected] 2007-03-14 Shay Kaplan 2007-03-14 Robert Black 2007-03-15 Joseph Grogan 2007-03-13 Joseph Grogan 2007-03-14 Avi Laker hi for help about the develop [email protected] 2007-03-13 I spin S1813 at 4000rpm 45s. Then hot bake 120Degree 10min Exposure 10s, then develop 30s.After 30s, I can't see anything. Why??? All paper recommend the develop time 30s. Thank you Yitian reply
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