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MEMSnet Home: MEMS-Talk: E-beam evaporation with Silver
E-beam evaporation with Silver
2007-03-14
Siripon Sukuabol
2007-03-14
Shay Kaplan
E-beam evaporation with Silver
Siripon Sukuabol
2007-03-14
HI..All,

Please advise... Anybody has ever deposited Silver (99.99%) on the silicon wafer
by using E-beam evaporation machine....

Does Silver have any effects with E-beam Chamber and machine?
For example, it makes chamber dirty and hard to clean.

Thank you for your advice.
Joe
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