A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: E-beam evaporation with Silver
E-beam evaporation with Silver
2007-03-14
Siripon Sukuabol
2007-03-14
Shay Kaplan
E-beam evaporation with Silver
Shay Kaplan
2007-03-14
Hi
Silver evaporates just fine. No problems. If you're going to evap only few
times you might want to line the surfaces with aluminum foil just as with
any other material.
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Siripon Sukuabol
Sent: Wednesday, March 14, 2007 7:42 AM
To: [email protected]
Subject: [mems-talk] E-beam evaporation with Silver

HI..All,

Please advise... Anybody has ever deposited Silver (99.99%) on the silicon
wafer by using E-beam evaporation machine....

Does Silver have any effects with E-beam Chamber and machine?
For example, it makes chamber dirty and hard to clean.
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.
MEMStaff Inc.
Tanner EDA by Mentor Graphics