A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Patterning gold on thermally evaporated Chromium by lift-off using acetone
Patterning gold on thermally evaporated Chromium by lift-off using acetone
2007-03-14
Yue Mun Pun, Jeffrey
Patterning gold on thermally evaporated Chromium by lift-off using acetone
Yue Mun Pun, Jeffrey
2007-03-14
Hi,
I have thermally evaporated Chromium on patterns of crosslinked and
uncrosslinked SU-8.  Subsequently I would like to pattern a Gold film on the
Chromium by lift-off process.  The resist will be lifted off using Acetone.  Now
in my experience, when Acetone is sprayed on the resist coated wafer, not only
the resist is removed, but the underlying Chromium and the uncrosslinked SU-8
beneath the Chromium as well.

Can anyone suggest to me how I can do this process and yet prevent the Acetone
from lifting the Chromium film and the underling uncrosslinked SU-8 as well?
Thanks!

Jeffrey
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
MEMS Technology Review
MEMStaff Inc.
University Wafer