On a high temp bake, the photo active compound changes Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of [email protected]
Sent: Wednesday, March 14, 2007 2:20 AM
To: [email protected]
Subject: RE: [mems-talk] hi for help about the develop

Thank you very much.
I exposed at 8.8mw/cm2 about 10s
What problem may be when the temperature is more than 100degree??