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MEMSnet Home: MEMS-Talk: AlGaAs microbeams cleaving??
AlGaAs microbeams cleaving??
2007-03-15
vaibhav mathur
2007-03-16
shay kaplan
AlGaAs microbeams cleaving??
vaibhav mathur
2007-03-15
I've fabricated an array of 50-400 microns long,two ends clamped AlGaAs
microbeams on GaAs substrate. Could someone suggest the best way to cleave
these beams precisely at desired lengths to form pairs of oppositely facing
cantilevers.Lasercutting is an expensive option, is there an alternate way
of doing this?

regards
Vaibhav Mathur
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