HI
You can attached the sample to a silicon wafer with a groove or a scribe
using resist or wax. Then cleave the wafer and release the resist / wax
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of vaibhav mathur
Sent: Thursday, March 15, 2007 9:26 PM
To: [email protected]
Subject: [mems-talk] AlGaAs microbeams cleaving??

I've fabricated an array of 50-400 microns long,two ends clamped AlGaAs
microbeams on GaAs substrate. Could someone suggest the best way to cleave
these beams precisely at desired lengths to form pairs of oppositely facing
cantilevers.Lasercutting is an expensive option, is there an alternate way
of doing this?