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MEMSnet Home: MEMS-Talk: Pin holes in evaporated Chromium, Titanium and Gold
Pin holes in evaporated Chromium, Titanium and Gold
2007-03-19
Yue Mun Pun, Jeffrey
2007-03-19
Shay Kaplan
2007-03-19
David Casale
2007-03-20
Yue Mun Pun, Jeffrey
Pin holes in evaporated Chromium, Titanium and Gold
Yue Mun Pun, Jeffrey
2007-03-19
Hi,
I'm just wondering if anybody has observed pin holes in thermally or e-beam
evaporated Chromium, Titanium and Gold.  If so, how thick do I have to evaporate
these metal films for the pin holes to disappear?

Mr. Jeffrey Mun Pun YUE
余文彬
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  [email protected]
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